The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2013
Filed:
Sep. 07, 2010
Applicants:
Galen L. Pfeiffer, Lincoln, NE (US);
Thomas E. Tiwald, Lincoln, NE (US);
Inventors:
Galen L. Pfeiffer, Lincoln, NE (US);
Thomas E. Tiwald, Lincoln, NE (US);
Assignee:
J.A. Woollam Co., Inc., Lincoln, NE (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 4/00 (2006.01); G01N 1/10 (2006.01);
U.S. Cl.
CPC ...
Abstract
An ellipsometer system comprising a small internal volume cell having fluid entry, and exit ports wherein bubble traps are present in a bifurcated fluid pathway continuous with the fluid exit port. There further being present input and output apertures, for entering and exiting electromagnetic radiation, positioned to allow causing a beam of electromagnetic radiation to impinge on a sample substrate at a location thereon at which, during use, fluid contacts; as well as methodology of its use.