The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8530319 B1

PDF
Full Text
Expired
Date of Patent:
Sep. 10, 2013

Filed:

Oct. 14, 2010
Applicants:

Ephrem G. Gebreselasie, South Burlington, VT (US);

Joseph M. Lukaitis, Pleasant Valley, NY (US);

Robert R. Robison, Colchester, VT (US);

William R. Tonti, Essex Junction, VT (US);

Ping-chuan Wang, Hopewell Junction, NY (US);

Inventors:

Ephrem G. Gebreselasie, South Burlington, VT (US);

Joseph M. Lukaitis, Pleasant Valley, NY (US);

Robert R. Robison, Colchester, VT (US);

William R. Tonti, Essex Junction, VT (US);

Ping-Chuan Wang, Hopewell Junction, NY (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 21/44 (2006.01);
U.S. Cl.
CPC ...
Abstract

An apparatus and a method of manufacturing an e-fuse includes a substrate, a patterned gate insulator on the substrate, and a patterned gate conductor on the patterned gate insulator. The patterned gate conductor has sidewalls and a top. A silicide contacts the sidewalls of the patterned gate conductor, the top of the patterned gate conductor, and a region of the substrate adjacent the patterned gate insulator and the patterned gate conductor.


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