The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 10, 2013

Filed:

Sep. 28, 2009
Applicants:

Junji Tominaga, Tsukuba, JP;

Takayuki Shima, Tsukuba, JP;

Alexander Kolobov, Tsukuba, JP;

Paul Fons, Tsukuba, JP;

Robert Simpson, Tsukuba, JP;

Reiko Kondo, Tsukuba, JP;

Inventors:

Junji Tominaga, Tsukuba, JP;

Takayuki Shima, Tsukuba, JP;

Alexander Kolobov, Tsukuba, JP;

Paul Fons, Tsukuba, JP;

Robert Simpson, Tsukuba, JP;

Reiko Kondo, Tsukuba, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of at least one embodiment of the present invention of manufacturing a solid-state memory is a method of manufacturing a solid-state memory, the solid-state memory including a recording film whose electric characteristics are varied by phase transformation, the method including: forming the recording film by forming a laminate of two or more layers so that a superlattice structure is provided, each of the layers having a parent phase which shows solid-to-solid phase-transformation, the recording film being formed at a temperature not lower than a temperature highest among crystallization temperatures of the parent phases. It is thus possible to manufacture a solid-state memory which requires lower current for recording and erasing data and has a greater rewriting cycle number.


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