The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2013
Filed:
Aug. 17, 2009
Applicant:
Makoto Kita, Osaka, JP;
Inventor:
Makoto Kita, Osaka, JP;
Assignee:
Sharp Kabushiki Kaisha, Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Exposure is performed by controlling an exposure amount applied to a photosensitive resinarranged on a metal film, and development is performed to the photosensitive resin, and thus a resistprovided with an edge sectionhaving a tilted surfacehaving a tilt angle α of at least 20° but no more than 60° is formed. Then, a metal wiring is formed by etching the metal filmby using the resistas a mask.