The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2013
Filed:
Oct. 01, 2003
Carissa Tudryn, Cambridge, MA (US);
Jeffrey Borenstein, Holliston, MA (US);
Ralph Hopkins, Chestnut Hill, MA (US);
Carissa Tudryn, Cambridge, MA (US);
Jeffrey Borenstein, Holliston, MA (US);
Ralph Hopkins, Chestnut Hill, MA (US);
The Charles Stark Draper Laboratory, Inc., Cambridge, MA (US);
Abstract
MEMS and microelectronic devices and fabrication methods feature providing a first material including a glass, providing a second material having an elastic modulus greater than the elastic modulus of silicon, causing the second material to have a surface with a RMS surface roughness of greater than 0.001 μm and less than approximately 0.15 μm, contacting the surface of the second material to a surface of the first material, and applying a voltage between the first and second materials to cause an anodic bond to form.