The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 10, 2013

Filed:

Jul. 12, 2011
Applicants:

Kentaro Miyajima, Uenohara, JP;

Mitsugu Kusunoki, Kunitachi, JP;

Inventors:

Kentaro Miyajima, Uenohara, JP;

Mitsugu Kusunoki, Kunitachi, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 7/16 (2006.01); G01L 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

Because of stress occurring due to a change in temperature, and presence of heat distribution on a semiconductor substrate, and a dopant dosage gradient, an offset output occurs to a Wheatstone bridge circuit intended for detection of strain, posing a problem. To solve the problem, diffusion resistors are disposed in the form of a matrix, and bridge resistors R, Reach are formed by selectively connecting diffusion resistors disposed in each odd column, in series with each other, while R, Reach are formed by selectively connecting diffusion resistors disposed in each even column, in series with each other.


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