The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2013
Filed:
Mar. 08, 2008
Applicant:
Sergei Ostapenko, Wesley Chapel, FL (US);
Inventor:
Sergei Ostapenko, Wesley Chapel, FL (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 29/00 (2006.01); G01N 29/04 (2006.01); G01M 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus and a method are disclosed for testing the quality of a wafer. The apparatus and a method comprise coupling a broad-band actuator to the wafer. Sweeping frequencies are connected to the broad-band actuator for vibrating the wafer. An acoustic sensor is coupled to the wafer for measuring a resonant frequency of the vibrating wafer. The measured resonant frequency of the vibrating wafer is compared with a reference resonant frequency to deterring the quality of the wafer.