The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2013
Filed:
Jul. 10, 2008
Ulrich Hofmann, Itzehoe, DE;
Hans-joachim Quenzer, Itzehoe, DE;
Marten Oldsen, Hamburg, DE;
Abstract
The invention relates to a microsystem having at least one micromirror () and at least one micromirror actuator () for pivoting the at least one micromirror () about at least one axis from a relaxed resting position, comprising a frame chip and a transparent cover () disposed on the frame chip, wherein the frame chip has a chip frame (), on which the at least one micromirror () is articulated in an elastically pivoting manner, wherein the at least one micromirror () is further disposed within the chip frame () and in a cavity () that is formed between the transparent cover () and a carrier layer. To this end, the at least one micromirror () is articulated on a frame () pivotally about the at least one axis, the frame () in turn being pivotally articulated on the chip frame (), wherein the frame () is permanently pivoted out of a chip plane defined by the carrier layer such that the micromirror () in the resting position thereof is tilted about a non-pivoting angle relative to the chip plane. The invention further relates to a method for the production of such a microsystem.