The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2013
Filed:
Feb. 12, 2009
Jasper Lodewyk Steyn, Winchester, MA (US);
Timothy J. Brosnihan, Natick, MA (US);
Joyce H. Wu, Somerville, MA (US);
Mark B. Andersson, Boston, MA (US);
Richard S. Payne, Andover, MA (US);
John J. Fijol, Shrewsbury, MA (US);
Roger W. Barton, Grand Marais, MN (US);
Nesbitt W. Hagood, Wellesley, MA (US);
Jasper Lodewyk Steyn, Winchester, MA (US);
Timothy J. Brosnihan, Natick, MA (US);
Joyce H. Wu, Somerville, MA (US);
Mark B. Andersson, Boston, MA (US);
Richard S. Payne, Andover, MA (US);
John J. Fijol, Shrewsbury, MA (US);
Roger W. Barton, Grand Marais, MN (US);
Nesbitt W. Hagood, Wellesley, MA (US);
Pixtronix, Inc., Andover, MA (US);
Abstract
The invention relates to a spatial light modulator including a substrate having a surface and a modulation assembly coupled to the substrate including a modulation element and a compliant beam. The modulation assembly is configured to limit the bending of the compliant beam towards an opposing surface that would otherwise be caused by inherent stresses within the compliant beam. The invention also relates to a method of manufacturing a spatial light modulator including the steps of forming and releasing a modulation assembly that has a modulation element and a compliant beam formed in a pre-release position to have an intended inherent stress state. As a result of the stress state in the compliant beam, upon release of the compliant beam, the compliant beam bends into a rest position which is different than the pre-release position, where the rest position is based in part on the intended inherent stress state.