The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 03, 2013

Filed:

Sep. 29, 2008
Applicants:

Krassimir T. Krastev, Eindhoven, NL;

Hendrikus W. L. A. M. Van Lierop, Eindhoven, NL;

Herman M. J. Soemers, Eindhoven, NL;

Renatus Hendricus Maria Sanders, Eindhoven, NL;

Antonius Johannes Maria Nellissen, Eindhoven, NL;

Inventors:
Assignee:

Innoluce B.V., Eindhoven, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

A MEMS scanning micromirror including a mirror body, the mirror bodyhaving a rotation axiswith a pair of extension barsparallel to the rotation axis; a frameforming a mirror recesswith a recess periphery, the framehaving a pair of opposed frame barson the recess peripheryalong the rotation axis; a pair of cantilever beam assemblies, each of the pair of cantilever beam assembliesbeing fixed to one of the pair of opposed frame barsand coupled to one end of the pair of extension bars; and a pair of vertical support beamsconnected between each of the pair of opposed frame barsto the mirror bodyalong the rotation axis


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