The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2013
Filed:
May. 16, 2011
Nobuaki Ueki, Saitama, JP;
Nobuaki Ueki, Saitama, JP;
Fujifilm Corporation, Tokyo, JP;
Abstract
A low coherent light from a white light source is emitted to a sample surface. A detour distance in a detour section is adjusted such that an optical path difference between a reference light and a sample light is equal to or shorter than a coherence length of interference light. The interference light is incident on an image sensor only when an inclination angle of a diffraction grating plate and a wavelength of the interference light satisfy a predetermined condition. Thus, an interference fringe image is formed. Based on each of the interference fringe images taken on a wavelength-by-wavelength basis of the interference light and an optical distance between a reference surface and the sample surface along an optical path of a measuring light at the time of taking the interference fringe image, a shape of the sample surface is measured.