The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2013
Filed:
Jul. 29, 2009
Applicant:
Paul Francis Michaloski, Rochester, NY (US);
Inventor:
Paul Francis Michaloski, Rochester, NY (US);
Assignee:
Corning Incorporated, Corning, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 27/72 (2006.01);
U.S. Cl.
CPC ...
Abstract
The focused spots of an active spot array projection system, such as a maskless lithographic projection system, are optimized within a relay of the projection system. A frequency modulator is positioned proximate to the pupil of the relay for reforming the focused spots while imaging the focused spots onto a photosensitive substrate.
Quick Actions:
Michaloski, Paul. (2013). Optimization of focused spots for maskless lithography (U.S. Patent No. 8525972). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8525972
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