The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2013
Filed:
Oct. 21, 2010
Zhijian LI, Shenzhen, CN;
Yi LI, Shenzhen, CN;
Zhubing He, Shenzhen, CN;
Shengming HU, Shenzhen, CN;
Chunzhu Wang, Shenzhen, CN;
Jianhua Zhou, Shenzhen, CN;
Zhijian Li, Shenzhen, CN;
Yi Li, Shenzhen, CN;
Zhubing He, Shenzhen, CN;
Shengming Hu, Shenzhen, CN;
Chunzhu Wang, Shenzhen, CN;
Jianhua Zhou, Shenzhen, CN;
Shenzhen TRONY Science & Technology Development Co., Ltd., Shenzhen, CN;
Abstract
A discharge electrode array for a silicon-based thin film solar cell deposition chamber is provided, relating to solar cell technologies. The discharge electrode array includes a signal feed component having a rectangular-shaped end, a flat waist corresponding to a feed-in port located in a hallowed rectangular area on a center region of a cathode plate having a shielding cover, connecting a feed-in power supply signal by surface contact. The electrode array includes at least a set of cathode plates and an anode plate, with two cathode plates sharing or surrounding one anode plate. Uniform large area and stable discharge driven by the RF/VHF power supply signal can be achieved, and the standing wave and the skin effect can be effectively removed. The production efficiency can be improved and the cost can be reduced.