The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2013
Filed:
Dec. 16, 2008
Applicant:
Marcello Riva, Hannover, DE;
Inventor:
Marcello Riva, Hannover, DE;
Assignee:
Solvay Fluor GmbH, Hannover, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K 13/00 (2006.01); C09K 13/04 (2006.01); C09K 13/08 (2006.01); C09K 13/06 (2006.01);
U.S. Cl.
CPC ...
Abstract
Elemental fluorine and carbonyl fluoride are suitable etchants for producing microelectromechanical devices ('MEMS'). They are preferably applied as mixtures with nitrogen and argon. If applied in Bosch-type process, CFis a highly suitable passivating gas.