The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 03, 2013

Filed:

Apr. 02, 2010
Applicants:

Yi Chun Tan, Penang, MY;

Choo Fooi Chew, Bukit Tengah, MY;

Siewboon Tan, Penang, MY;

Lee Chu Liew, Penang, MY;

Inventors:

Yi Chun Tan, Penang, MY;

Choo Fooi Chew, Bukit Tengah, MY;

Siewboon Tan, Penang, MY;

Lee Chu Liew, Penang, MY;

Assignee:

WD Media, LLC, San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

Apparatus and method for cooling a recording media disk in a deposition system. A manifold spacer including an input port to receive a coolant gas and a first output port to output the coolant gas couples a pair of cooling plates together, the pair of cooling plates having opposing surfaces spaced apart by the manifold spacer to accommodate a passage of disks to be cooled. A first shower manifold is coupled to a first of the pair of cooling plates, the first shower manifold receives the coolant gas from the first output port in the manifold spacer and outputs the coolant gas flow in a first direction perpendicular to the opposing cooling plate surfaces and toward the media disk to be cooled.


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