The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2013
Filed:
Dec. 12, 2008
Applicants:
Sun Yalei, Singapore, SG;
Uday Nayak, San Jose, CA (US);
Inventors:
Sun Yalei, Singapore, SG;
Uday Nayak, San Jose, CA (US);
Assignee:
FormFactor, Inc., Livermore, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
Methods and apparatuses for modifying a stage position and measuring at least one parameter of a motor connected with a stage during a commanded stage position are described. In one embodiment of one aspect of the invention, the motor is configured to move the stage in a first direction in response to the at least one parameter and determine whether the at least one parameter is within a threshold range.