The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2013
Filed:
Jan. 14, 2011
Applicants:
Kenji Shibata, Tsukuba, JP;
Kazufumi Suenaga, Tsuchiura, JP;
Akira Nomoto, Kasumigaura, JP;
Kazutoshi Watanabe, Tsuchiura, JP;
Inventors:
Kenji Shibata, Tsukuba, JP;
Kazufumi Suenaga, Tsuchiura, JP;
Akira Nomoto, Kasumigaura, JP;
Kazutoshi Watanabe, Tsuchiura, JP;
Assignee:
Hitachi Cable, Ltd., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01);
U.S. Cl.
CPC ...
Abstract
To provide a piezoelectric thin film on a substrate, having an alkali-niobium oxide-based perovskite structure expressed by a composition formula (KNa)NbO, wherein the composition ratio x of the piezoelectric thin film expressed by (KNa)NbOis in a range of 0.4≦x≦0.7, and a half width of a rocking curve of (001) plane by X-ray diffraction measurement is in a range of 0.5° or more and 2.5° or less.