The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2013
Filed:
Jul. 01, 2009
Applicants:
Christof Metzmacher, La Calamine, BE;
Achim Weber, Aachen, DE;
Inventors:
Christof Metzmacher, La Calamine, BE;
Achim Weber, Aachen, DE;
Assignees:
Koninklijke Philips N.V., Eindhoven, NL;
Xtreme Technologies GmbH, Aachen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 35/20 (2006.01);
U.S. Cl.
CPC ...
H01J 35/20 (2013.01);
Abstract
The invention relates to an improved EUV generating device having coated supply pipes for the liquid tin, in order to provide an extreme UV radiation generating device which is capable of providing a less contaminated flow of tin to and from a plasma generating part.