The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 27, 2013

Filed:

Apr. 08, 2011
Applicant:

Praveen Muraleedharan Shenoy, Wilkes Barre, PA (US);

Inventor:

Praveen Muraleedharan Shenoy, Wilkes Barre, PA (US);

Assignee:

Fairchild Semiconductor Corporation, South Portland, ME (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/76 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of forming an accumulation-mode field effect transistor includes forming a channel region of a first conductivity type in a semiconductor region of the first conductivity type. The channel region may extend from a top surface of the semiconductor region to a first depth within the semiconductor region. The method also includes forming gate trenches in the semiconductor region. The gate trenches may extend from the top surface of the semiconductor region to a second depth within the semiconductor region below the first depth. The method also includes forming a first plurality of silicon regions of a second conductivity type in the semiconductor region such that the first plurality of silicon regions form P-N junctions with the channel region along vertical walls of the first plurality of silicon regions.


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