The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2013
Filed:
Apr. 30, 2009
Applicants:
Ulrich Kroll, Corcelles, CH;
Boris Legradic, Lausanne, CH;
Inventors:
Ulrich Kroll, Corcelles, CH;
Boris Legradic, Lausanne, CH;
Assignee:
Tel Solar AG, Trubbach, CH;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C03C 15/00 (2006.01); C03C 25/68 (2006.01); C23C 16/50 (2006.01);
U.S. Cl.
CPC ...
Abstract
A remote plasma source comprises a first plate-like electrode () and a second plate-like electrode () which are arranged in parallelism and mutually electrically DC isolated. The two electrodes () are operationally connected to an Rf generator (). The first electrode () has a surface which is freely exposed to a substrate holder () and has a pattern of through-openings () distributed along its surface extent.