Laser illumination device, illumination method, semiconductor element manufacturing method, projection display device, and image display method using the projection display device

Abstract

A laser illumination device for providing a light intensity distribution of a high-intensity and uniform illumination light flux is obtained. The device includes a plurality of light source modules () each including: a plurality of light source units (), in each of which a semiconductor laser (), and a laser medium () and a nonlinear material () which are flat-shaped and have a waveguide structure are arranged on the same plane, for performing continuous oscillation in a waveguide mode of the laser medium (); and a first optical system () for coupling laser oscillation beams from the plurality of light source units (). The device further includes: a second optical system () for coupling laser light beams propagating from the plurality of light source modules () through first optical fibers () and a second optical fiber array (); a uniformization element () for converting a laser light beam from the second optical system () into a uniform laser light beam; and a third optical system () for projecting, to a substrate () which is an illuminated surface (), the uniform laser light beam obtained through the uniformization element () at a predetermined magnification, to produce an illumination light flux ().