The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 27, 2013

Filed:

May. 18, 2012
Applicants:

Eiji Umetsu, Niigata-ken, JP;

Masahiko Ishizone, Niigata-ken, JP;

Motoki Hirayama, Niigata-ken, JP;

Hideki Gochou, Niigata-ken, JP;

Inventors:

Eiji Umetsu, Niigata-ken, JP;

Masahiko Ishizone, Niigata-ken, JP;

Motoki Hirayama, Niigata-ken, JP;

Hideki Gochou, Niigata-ken, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 1/04 (2006.01); G01L 1/10 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A sensor substrate includes a plurality of piezoresistance elements. The electrical resistance of each piezoresistance element changes in accordance with an amount of displacement of a displacement portion displaced by an external load applied through a pressure receiving unit. A base substrate supports the sensor substrate. The sensor substrate and the base substrate each include a support supporting the displacement portion such that the displacement portion can be displaced and a plurality of electrically connecting portions electrically connected to the plurality of piezoresistance elements. The supports of the sensor and base substrates are joined to each other and the plurality of electrically connecting portions of the sensor and base substrates are joined to each other. Furthermore, in each of the sensor and base substrates, either the support or the plurality of electrically connecting portions or both extend to the periphery of the sensor substrate or the base substrate.


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