The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2013
Filed:
Apr. 02, 2012
Kunihiko Nakamura, Osaka, JP;
Tomohiro Iwasaki, Shiga, JP;
Takehiko Yamakawa, Osaka, JP;
Keiji Onishi, Osaka, JP;
Kunihiko Nakamura, Osaka, JP;
Tomohiro Iwasaki, Shiga, JP;
Takehiko Yamakawa, Osaka, JP;
Keiji Onishi, Osaka, JP;
Panasonic Corporation, Osaka, JP;
Abstract
A MEMS resonatorincluding a substrate; an vibratorincluding an mechanically vibrating part and a fixed part; at least one electrodethat is close to the vibrator and has an area overlapping with the vibrator across a gapin a direction perpendicular to a surface of the substrate; and a pressure transferring mechanism to displace the at least one electrode according to an externally applied pressure so as to change the gap; is connected to a detection circuit that detects transmission characteristics of an AC signal from an input electrode to an output electrode, the input and output electrodes being one and the other of the vibratorand the at least one electrode, and the pressure is detected based on the transmission characteristics of the AC signal that is detected by the detection circuit.