The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2013
Filed:
Oct. 05, 2012
Industrial Technology Research Institute, Hsinchu, TW;
Kuo-Tung Tiao, Zhubei, TW;
Jau-Jiu Ju, Zhudong Township, Hsinchu County, TW;
Guo-Zua Wu, Taichung, TW;
Tai-Ting Huang, Hsinchu, TW;
Yuan-Chin Lee, Hsinchu, TW;
Rung-Ywan Tsai, Guishan Township, Taoyuan County, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
An optical equipment for inspecting and addressing a specimen is disclosed. The optical equipment comprises an optical device and a processing module. The optical device comprises a light source, a sample inspecting device and an address detecting device. The sample inspecting device comprises a first objective lens and a first detector. A beam is focused on a sample placed in an inspected site of a specimen by the first objective lens. The address detecting device comprises a second objective lens and a second detector. A beam is focused on the address coding site by the second objective lens. The processing module controls the beam to be focused on the sampling points of the inspected site to generate first optical signals, and simultaneously controls the beam of the light source to be focused on the corresponding address codes of the address coding site to generate second optical signals.