The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2013
Filed:
May. 30, 2012
Applicant:
Hiroshi Aoki, Yokohama, JP;
Inventor:
Hiroshi Aoki, Yokohama, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An aspect of an inspecting apparatus includes a profile measuring part measuring a profile of an object surface and an image detecting part detecting a light intensity distribution of the object surface by illuminating the object surface from mutually different plurality of directions.
Aoki, Hiroshi. (2013). Inspecting apparatus, three-dimensional profile measuring apparatus, and manufacturing method of structure (U.S. Patent No. 8514389). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8514389
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile