The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2013
Filed:
May. 29, 2009
Peter Gerard Steeneken, Valkenswaard, NL;
Hilco Suy, Hulst, NL;
Martijn Goossens, Veldhoven, NL;
Olaf Wunnicke, Eindhoven, NL;
Peter Gerard Steeneken, Valkenswaard, NL;
Hilco Suy, Hulst, NL;
Martijn Goossens, Veldhoven, NL;
Olaf Wunnicke, Eindhoven, NL;
NXP B.V., Eindhoven, NL;
Abstract
A MEMS switch (), and methods of fabricating thereof, the switch comprising: a sealed cavity (); and a membrane (); wherein the sealed cavity () is defined in part by the membrane (); and the membrane is a 5 metallic membrane (), for example consisting of a single type of metal or metal alloy. The MEMS switch () may comprise a top electrode (), for example extending into the cavity (), located in a hole () in the metallic membrane (). Fabrication may include providing a sacrificial layer () in a partly defined cavity (). The bending stiffness of the membrane () may behigher along an RF line () than along a line () perpendicular to the RF line (), for example by virtue of the cavity () being elliptical.