The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2013
Filed:
May. 17, 2011
Masahiro Shimizu, Nirasaki, JP;
Masahiro Shimizu, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A processing apparatus using an electromagnetic wave is provided to perform a heat treatment on a target object. The processing apparatus includes a metallic processing chamber; a loading/unloading opening provided in one end of the processing chamber; a closing body capable of closing and opening the loading/unloading opening; a holding unit loaded and unloaded into and from the inside of the processing chamber through the loading/unloading opening, holding target objects at a predetermined interval, the holding unit being made of a material allowing the electromagnetic wave to transmit therethrough; an electromagnetic wave supply unit for introducing the electromagnetic wave into the processing chamber; a gas introducing unit for introducing a gas into the processing chamber; and a gas exhaust unit for exhausting an atmosphere in the processing chamber.