The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2013
Filed:
Jun. 15, 2010
Francois Perruchot, Grenoble, FR;
Lianjun Liu, Chandler, AZ (US);
Sergio Pacheco, Scottsdale, AZ (US);
Emmanuel Defay, Voreppe, FR;
Patrice Rey, Saint Jean de Moirans, FR;
Francois Perruchot, Grenoble, FR;
Lianjun Liu, Chandler, AZ (US);
Sergio Pacheco, Scottsdale, AZ (US);
Emmanuel Defay, Voreppe, FR;
Patrice Rey, Saint Jean de Moirans, FR;
Freescale Semiconductor, Inc., Austin, TX (US);
Commissariat Ă l'Energie Atomique et aux Energies Alternatives (CEA), Paris, FR;
Abstract
A method of forming an electromechanical transducer device comprises forming on a fixed structure a movable structure and an actuating structure of the electromechanical transducer device, wherein the movable structure is arranged in operation of the electromechanical transducer device to be movable in relation to the fixed structure in response to actuation of the actuating structure. The method further comprises providing a stress trimming layer on at least part of the movable structure, after providing the stress trimming layer, releasing the movable structure from the fixed structure to provide a released electromechanical transducer device, and after releasing the movable structure changing stress in the stress trimming layer of the released electromechanical transducer device such that the movable structure is deflected a predetermined amount relative to the fixed structure when the electromechanical transducer device is in an off state.