The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2013
Filed:
Nov. 30, 2009
Chuan-wei Wang, Hsin-Chu, TW;
Sheng-ta Lee, Hsin-Chu, TW;
Hsin-hui Hsu, Hsin-Chu, TW;
Wei-chung Wang, Hsin-Chu, TW;
Chuan-Wei Wang, Hsin-Chu, TW;
Sheng-Ta Lee, Hsin-Chu, TW;
Hsin-Hui Hsu, Hsin-Chu, TW;
Wei-Chung Wang, Hsin-Chu, TW;
Pixart Imaging Corporation, Hsin-Chu, TW;
Abstract
The present invention discloses a MEMS (Micro-Electro-Mechanical System) chip and a method for making the MEMS chip. The MEMS chip comprises: a first substrate having a first surface and a second surface opposing each other; a microelectronic device area on the first surface; a first MEMS device area on the second surface; and a conductive interconnection structure electrically connecting the microelectronic device area and the first MEMS device area.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile