The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2013
Filed:
Mar. 09, 2011
Ryohei Tanaka, Osaka, JP;
Ryohei Tanaka, Osaka, JP;
DAIHEN Corporation, Osaka, JP;
Abstract
A method is provided for calibrating voltage values and current values detected by a high-frequency measuring device. In a first step, a first parameter is calculated based on impedances calculated when the measuring device is connected to a first set of three reference loads and impedances of the first set of three reference loads. In a second step, plasma processing is carried out with the measuring device connected to a load to be measured, and detected voltage and current values are calibrated using the first parameter, and impedances as viewed from a connection point towards the load side are calculated based on the calibrated voltage and current values. In a third step, three impedances that encompass, when displayed on a Smith chart, a narrower range than a range encompassed by the impedances of the first set of three reference loads are determined, where the narrower range includes the impedances calculated in the second step. In a fourth step, a second parameter is calculated based on impedances calculated when the measuring device is connected to a second set of three reference loads respectively having the three impedances and also on impedances of the second set of three reference loads. In a fifth step, the measuring device is connected to the load to be measured, and detected voltage and current values are calibrated using the first parameter and the second parameter.