The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2013
Filed:
Oct. 28, 2011
Yun Sung Kang, Gyunggi-do, KR;
Jung Won Lee, Seoul, KR;
Jong Woon Kim, Seoul, KR;
Seung Hun Han, Gyunggi-do, KR;
Min Kyu Choi, Incheon, KR;
Yun Sung Kang, Gyunggi-do, KR;
Jung Won Lee, Seoul, KR;
Jong Woon Kim, Seoul, KR;
Seung Hun Han, Gyunggi-do, KR;
Min Kyu Choi, Incheon, KR;
Samsung Electro-Mechanics Co., Ltd, Gyunggi-Do, KR;
Abstract
Disclosed herein is an inertial sensor of the present invention. An inertial sensoraccording to a preferred embodiment of the present invention includes a plate-shaped membrane, a mass bodydisposed under a central portionof the membrane, a postdisposed under an edgeof the membraneand surrounding the mass body, a piezoelectric materialformed above the membraneand provided with a cavityin a thickness direction, a sensing electrodedisposed in the cavityand a driving electrodedisposed outside the cavity, whereby the thickness of the piezoelectric materialof the portion on which the sensing electrodeis disposed is formed to be thin, such that the sensitivity of the inertial sensorcan be improved.