The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 13, 2013

Filed:

May. 28, 2008
Applicants:

Kazuhiko Yamanouchi, Miyagi, JP;

Yusuke Satoh, Miyagi, JP;

Inventors:

Kazuhiko Yamanouchi, Miyagi, JP;

Yusuke Satoh, Miyagi, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/04 (2006.01);
U.S. Cl.
CPC ...
Abstract

The structure of the patent is a substrate wherein a metal electrode, a dielectric thin film, and a further dielectric thin film are adhered onto a piezoelectric substrate. A substrate wherein elastic wave energy is confined in the piezoelectric substrate can be obtained. In particular, when a SiOthin film and an AlN thin film are used as thin filmsand, respectively, a substrate excellent in an electromechanical coupling coefficient (k) and a temperature characteristic of frequency can be yielded by making the film thicknesses of electrodesandand those of the thin filmsandinto optimal values.


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