The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 13, 2013

Filed:

Dec. 08, 2008
Applicants:

John E. Q. Hughes, Phoenix, AZ (US);

Donald D. Ware, Woodbury, MN (US);

Steven M. Lurcott, Sherman, CT (US);

Peter Wrschka, Phoenix, AZ (US);

Inventors:

John E. Q. Hughes, Phoenix, AZ (US);

Donald D. Ware, Woodbury, MN (US);

Steven M. Lurcott, Sherman, CT (US);

Peter Wrschka, Phoenix, AZ (US);

Assignee:

Foresight Processing, LLC, Tempe, AZ (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract

Common sources of different (e.g., concentrated) process materials are controllably supplied to multiple blending manifolds associated with multiple process tools, processing stations, or other points of use, to create an independently controllable process material blend for each tool, station, or point of use. Multi-constituent process materials may be circulated from a supply container through a blending manifold to a return container to ensure homogeneity until immediately prior to blending and use. Such containers may include liner-based containers adapted for pressure dispensation.


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