The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2013
Filed:
Sep. 27, 2010
Applicants:
LI Chen, Arlington, MA (US);
Christine H. Tsau, Arlington, MA (US);
Thomas Kieran Nunan, Carlisle, MA (US);
Kuang L. Yang, Newton, MA (US);
Inventors:
Li Chen, Arlington, MA (US);
Christine H. Tsau, Arlington, MA (US);
Thomas Kieran Nunan, Carlisle, MA (US);
Kuang L. Yang, Newton, MA (US);
Assignee:
Analog Devices, Inc., Norwood, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A MEMS device has a first member that is movable relative to a second member. At least one of the first member and the second member has exposed silicon carbide with a water contact angle of greater than about 70 degrees.