The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2013
Filed:
Jul. 06, 2010
Shuichi Murakami, Shizuoka, JP;
Takashi Kozeki, Otake, JP;
Shuichi Murakami, Shizuoka, JP;
Takashi Kozeki, Otake, JP;
Mitsui Chemicals, Inc., Minato-Ku, Tokyo, JP;
Abstract
Provided is a pellicle that has appropriate membrane strength, high resistance to chemicals, and a low degree of sulfate ion generation and outgassing. A provided pellicle frame supports the outer rim of a pellicle membrane, and an epoxy resin coating is formed on the surface of the pellicle frame. In the infrared absorption spectrum of said epoxy resin coating, the ratio of the absorbance of a peak in the range between 1450 cmand 1550 cmto the absorbance of a peak in the range between 1200 cmand 1275 cmis at least 0.5 and at most 3; also, the ratio of the absorbance of a peak in the range between 1450 cmand 1550 cmto the absorbance of a peak in the range between 905 cmand 930 cmis at least 1 and less than 7.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile