The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2013
Filed:
Sep. 21, 2009
Qihong Wu, Somerset, NJ (US);
Sheng Liu, Harrison, NJ (US);
Xu Zhang, Montville, NJ (US);
Shiaw-wen Tai, Livingston, NJ (US);
Xiaohua Du, Highland Park, NJ (US);
Thomas Tombler, Somerset, NJ (US);
Qihong Wu, Somerset, NJ (US);
Sheng Liu, Harrison, NJ (US);
Xu Zhang, Montville, NJ (US);
Shiaw-wen Tai, Livingston, NJ (US);
Xiaohua Du, Highland Park, NJ (US);
Thomas Tombler, Somerset, NJ (US);
Polarization Solutions, LLC, Somerset, NJ (US);
Abstract
Methods for forming a metal grating include providing a first grating including a plurality of grating lines formed from a dielectric material, each grating having a pair of sidewalls, facing sidewalls of adjacent grating lines being separated by corresponding trenches, the grating lines and trenches forming a grating surface; forming a layer of a metal on the grating surface, where the metal layer has a constant thickness and conforms to the grating surface; and removing portions of the metal layer between sidewalls of adjacent grating lines of the first grating to form a metal grating having grating lines formed from the metal, the grating lines of the metal grating corresponding to the portions of the metal layer adjacent the sidewalls of the grating lines of the first grating. The metal grating has a pitch of 200 nm or less, a depth of 50 nm or more, and the grating lines of the metal grating have an aspect ratio of 10-to-1 or more.