The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2013
Filed:
Aug. 03, 2011
Gregory John Mcavoy, Dublin, IE;
Rónán Pádraig Seán O'reilly, Dublin, IE;
David Mcleod Johnstone, Balmain, AU;
Kia Silverbrook, Balmain, AU;
Gregory John McAvoy, Dublin, IE;
Rónán Pádraig Seán O'Reilly, Dublin, IE;
David McLeod Johnstone, Balmain, AU;
Kia Silverbrook, Balmain, AU;
Zamtec Ltd, Dublin, IE;
Abstract
A MEMS integrated circuit includes a silicon substrate having a frontside with a drive circuitry layer and a backside. A MEMS layer is disposed on the drive circuitry layer. The MEMS layer includes a plurality of MEMS devices electrically connected to the drive circuitry layer. Integrated circuit contacts are positioned at a backside of the substrate. The integrated circuit contacts are electrically connected to the drive circuitry layer via respective connector rods extending through the substrate.