The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2013
Filed:
Mar. 01, 2011
Yusuke Koda, Utsunomiya, JP;
Yoshiyuki Kuramoto, Utsunomiya, JP;
Yusuke Koda, Utsunomiya, JP;
Yoshiyuki Kuramoto, Utsunomiya, JP;
Canon Kabushiki Kaisha, , JP;
Abstract
A lightwave interference measurement apparatus includes a wavelength-variable laser which periodically performs wavelength scanning between first and second reference wavelengths to emit light beam, a wavelength-fixed laser which emits light beam having a third reference wavelength, a light beam splitting element which splits the light beams into reference light beam and light beam under test, a phase detector which detects a phase based on an interference signal of the reference light beam and the light beam under test, and an analyzer which sequentially determines an interference order of the third reference wavelength based on the third reference wavelength, first and second synthetic wavelengths, an integer component of a phase change amount in the wavelength scanning, and interference orders of the first and second synthetic wavelengths, and calculates an absolute distance between the surface under test and the reference surface.