The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2013
Filed:
Sep. 28, 2009
Applicant:
Stephan Jost, Azmoos, CH;
Inventor:
Stephan Jost, Azmoos, CH;
Assignee:
Tel Solar AG, Trubbach, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An electrode () of a radiofrequency parallel plate plasma reactor includes an electrode surface of a multitude of surfaces of metal members () which reside on dielectric spacing members (), whereby the metal members () are mounted in an electrically floating manner. The dielectric members () are mounted, opposite to the metal members (), upon a metal Rf supply body ().