The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 06, 2013

Filed:

Jan. 29, 2010
Applicants:

Hideo Takami, Ibaraki, JP;

Masataka Yahagi, Ibaraki, JP;

Inventors:

Hideo Takami, Ibaraki, JP;

Masataka Yahagi, Ibaraki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F21V 9/00 (2006.01); G02B 5/02 (2006.01); G02C 7/10 (2006.01); G02F 1/361 (2006.01); G03B 11/00 (2006.01); C23C 14/00 (2006.01); C23C 14/32 (2006.01);
U.S. Cl.
CPC ...
Abstract

A thin film comprising titanium oxide as its main component, wherein the thin film includes titanium, oxygen and copper, content of Ti is 29.0 at % or higher and 34.0 at % or less and content of Cu is 0.003 at % or higher and 7.7 at % or less with remainder being oxygen and unavoidable impurities, and ratio of oxygen component to metal components, O/(2Ti+0.5Cu), is 0.96 or higher. This invention aims to obtain a thin film comprising titanium oxide as its main component with a high refractive index and low extinction coefficient and a sintered compact sputtering target comprising titanium oxide as its main component which is suitable for producing the foregoing thin film, to obtain a thin film with superior transmittance and low reflectance and which is effective as an interference film or protective film of an optical information recording medium, and to obtain a thin film that can be applied to a glass substrate; that is, a thin film that can be used as a heat ray reflective film, antireflection film, and interference filter.


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