The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2013
Filed:
Aug. 14, 2008
Kazuyuki Ota, Yokohama, JP;
Hiroshi Yoshikawa, Kawasaki, JP;
Yusuke Mitarai, Tokyo, JP;
Masafumi Takimoto, Kawasaki, JP;
Kazunori Okudomi, Kawasaki, JP;
Hiroyuki Shinbata, Tama, JP;
Kenji Saitoh, Atsugi, JP;
Masakazu Matsugu, Yokohama, JP;
Kazuyuki Ota, Yokohama, JP;
Hiroshi Yoshikawa, Kawasaki, JP;
Yusuke Mitarai, Tokyo, JP;
Masafumi Takimoto, Kawasaki, JP;
Kazunori Okudomi, Kawasaki, JP;
Hiroyuki Shinbata, Tama, JP;
Kenji Saitoh, Atsugi, JP;
Masakazu Matsugu, Yokohama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A measurement apparatus includes an illumination light setting unit which sets illumination light having an optical characteristic corresponding to a microstructure which is formed on the surface of a measurement target and is to be measured, and a measurement unit which measures reflected light when the measurement target is irradiated with the illumination light. In addition, an extraction unit extracts, from the measured reflected light, information about the surface shape of the measurement target and the microstructure formed on the surface.