The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2013
Filed:
Jan. 23, 2007
J. Gary Eden, Mahomet, IL (US);
Sung-jin Park, Champaign, IL (US);
Meng LU, Urbana, IL (US);
Brian Cunningham, Champaign, IL (US);
J. Gary Eden, Mahomet, IL (US);
Sung-Jin Park, Champaign, IL (US);
Meng Lu, Urbana, IL (US);
Brian Cunningham, Champaign, IL (US);
The Board of Trustees of the University of Illinois, Urbana, IL (US);
Abstract
A microplasma device includes a substrate and either or both of a microchannel or microcavity defined in a polymer layer supported by the substrate. Electrodes arranged with respect to the polymer material can excite a plasma in a discharge medium contained in the microchannel or the microcavity or both. A method of forming a microplasma device places a curable polymer material between a mold having a negative volume impression of microcavities and/or microchannels and a substrate. The polymer is cured and then the mold is separated from the solid polymer.