The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 30, 2013

Filed:

Apr. 16, 2010
Applicants:

Mostafa Medhat, Heliopolis Cairo, EG;

Yasseen Nada, Heliopolis Cairo, EG;

Bassem Mortada, Nasr, EG;

Bassam A. Saadany, Nasr, EG;

Inventors:

Mostafa Medhat, Heliopolis Cairo, EG;

Yasseen Nada, Heliopolis Cairo, EG;

Bassem Mortada, Nasr, EG;

Bassam A. Saadany, Nasr, EG;

Assignee:

Si-Ware Systems, Cairo, EG;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H02N 1/00 (2006.01); H01L 41/04 (2006.01);
U.S. Cl.
CPC ...
Abstract

An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies.


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