The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2013
Filed:
Feb. 23, 2007
Richard Ian Laming, Edinburgh, GB;
Anthony Traynor, Livingston, GB;
Richard Ian Laming, Edinburgh, GB;
Anthony Traynor, Livingston, GB;
Wolfson Microelectronics plc, Edinburgh, GB;
Abstract
A method of fabricating a micro-electrical-mechanical system (MEMS) apparatus on a substrate () comprises the steps of processing the substrate () so as to fabricate an electronic circuit (); depositing a first electrode () that is operably coupled with the electronic circuit (); depositing a membrane () so that it is mechanically coupled to the first electrode (); applying a sacrificial layer (); depositing a structural layer () and a second electrode () that is operably coupled with the electronic circuit () so that the sacrificial layer () is disposed between the membrane () and the structural layer () so as to form a preliminary structure; singulating the substrate (); and removing the sacrificial layer () so as to form a MEMS structure, in which the step of singulating the substrate () is carried out before the step of removing the sacrificial layer ().