The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2013
Filed:
Apr. 28, 2008
Jüergen Ramm, Maienfeld, CH;
Beno Widrig, Bad Ragaz, CH;
Stephan Kasemann, Feldkirch, AT;
Marcelo Dornelles Pimenta, Sargans, CH;
Orlaw Massler, Triesenberg, LI;
Barbara Hanselmann, Oberschan, CH;
Jüergen Ramm, Maienfeld, CH;
Beno Widrig, Bad Ragaz, CH;
Stephan Kasemann, Feldkirch, AT;
Marcelo Dornelles Pimenta, Sargans, CH;
Orlaw Massler, Triesenberg, LI;
Barbara Hanselmann, Oberschan, CH;
Oerlikon Trading AG, Trubbach, Trubbach, CH;
Abstract
Vacuum treatment installation or vacuum treatment method for carrying out a plasma method, wherein the treatment is carried out in a vacuum chamber, in which are disposed a device for generating an electric low voltage arc discharge (NVBE) comprised of a cathode and an anode electrically interconnectable with the cathode via an arc generator, and a workpiece carrier electrically interconnectable with a bias generator for receiving and moving workpieces, as well as at least one feed for inert and/or reactive gas. At least a portion of the surface of the anode is therein fabricated of graphite and is operated at high temperature.