The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2013
Filed:
Feb. 17, 2006
Bobby M. Ronsse, Escondido, CA (US);
Craig R. Metzner, Fremont, CA (US);
Richard Omar Collins, Santa Clara, CA (US);
Bobby M. Ronsse, Escondido, CA (US);
Craig R. Metzner, Fremont, CA (US);
Richard Omar Collins, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An integrated deposition system is described that is capable of vaporizing low vapor pressure liquid precursors and conveying the vapor to a processing region to fabricate advanced integrated circuits. The integrated deposition system includes a heated exhaust system, a remote plasma generator, a processing chamber, a liquid delivery system, and a computer control module that together create a commercially viable and production worthy system for depositing high capacity dielectric materials from low vapor pressure precursors.