The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2013
Filed:
Aug. 28, 2008
Applicant:
Hirohisa Tanaka, Kumagaya, JP;
Inventor:
Hirohisa Tanaka, Kumagaya, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03B 27/42 (2006.01);
U.S. Cl.
CPC ...
Abstract
An illumination optical apparatus that substantially maintains a desirable profile even when changing the outer shape of light intensity distribution formed on an illumination pupil plane with an axicon system. The illumination optical system illuminates an irradiated surface based on light from an optical source and includes a prism system, which changes the interval along an optical axis between a pair of prisms to change the light intensity distribution on an illumination pupil plane.