The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2013
Filed:
Nov. 15, 2011
Heiko Stahl, Reutlingen, DE;
Christina Leinenbach, Ensdorf, DE;
Axel Franke, Ditzingen, DE;
Jochen Reinmuth, Reutlingen, DE;
Ando Feyh, Palo Alto, CA (US);
Christian Rettig, Eningen, DE;
Heiko Stahl, Reutlingen, DE;
Christina Leinenbach, Ensdorf, DE;
Axel Franke, Ditzingen, DE;
Jochen Reinmuth, Reutlingen, DE;
Ando Feyh, Palo Alto, CA (US);
Christian Rettig, Eningen, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A method for producing a micromechanical component is described. The method includes providing a substrate having a layer system including an insulating material situated on the substrate, a conductive layer section and a protective layer structure connected to the conductive layer section, which borders a section of the insulating material. The method furthermore includes carrying out an isotropic etching process for removing a part of the insulating material, the conductive layer section and the protective layer structure preventing the removal of the bordered section of the insulating material; and a structural element being developed, which includes the conductive layer section, the protective layer structure and the bordered section of the insulating material.