The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2013
Filed:
Dec. 06, 2010
Jae Won Hahn, Seoul, KR;
Jae Won Hahn, Seoul, KR;
Abstract
A contact type plasmonic nano optical probe, a parallel probe constituted of the same, a plasmonic optical apparatus including the parallel probe, and a method of fabricating the parallel probe are disclosed. A contact type plasmonic nano optical probe includes a probe tip which protrudes in a truncated shape having a narrower plan surface and a wider plan surface relatively wider than the narrower plan surface, of which a metal thin film is coated on a surface, of and which an aperture of nm diameter included in a portion of the metal thin film on a central portion of the narrower plan surface, a spring structure disposed at a perimeter of the probe tip and configured to maintain a distance between the probe tip and a film to be exposed, a dielectric filled within the aperture, and a protection layer disposed on the narrower plan surface of the probe tip. Here, an optical transport path is included within the probe tip to be connected to the aperture. A plasmonic optical apparatus including a parallel plasmonic probe is constituted of a probe array including a plurality of probe modules in which the contact type plasmonic nano optical probes are disposed at a uniform distance on a substrate.