The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2013
Filed:
Mar. 08, 2011
Yongchun Xin, Hopewell Junction, NY (US);
Xu Ouyang, Hopewell Junction, NY (US);
Yunsheng Song, Hopewell Junction, NY (US);
Tso-hui Ting, Hopewell Junction, NY (US);
Yongchun Xin, Hopewell Junction, NY (US);
Xu Ouyang, Hopewell Junction, NY (US);
Yunsheng Song, Hopewell Junction, NY (US);
Tso-Hui Ting, Hopewell Junction, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A system for performing alignment of two wafers is disclosed. The system comprises an optical coherence tomography system and a wafer alignment system. The wafer alignment system is configured and disposed to control the relative position of a first wafer and a second wafer. The optical coherence tomography system is configured and disposed to compute coordinate data for a plurality of alignment marks on the first wafer and second wafer, and send that coordinate data to the wafer alignment system.